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摘要: 隨著科學技術的快速發展，微電子器件在不同領域得到越來越廣泛的應用。對于高集成化和高頻化的微電子器件，傳統的冷卻技術已很難滿足高效散熱的需求，因此對器件的可靠性與安全性帶來嚴重的影響。近年來，研究者提出了多種無源換熱過程強化技術，但是這些技術在不同程度上增加了流動阻力從而極大地限制了其應用潛力。超聲波技術具有成本低、使用簡便、操控靈活、穿透性強和無污染等特點，超聲波與散熱技術相結合實現有源換熱過程強化已逐漸引起研究者的關注和重視。本文對超聲波激勵換熱過程強化的研究進展進行了系統綜述，首先介紹超聲波強化換熱的機理，然后總結并分析超聲波技術在單相氣體對流、單相液體對流、池沸騰和流動沸騰換熱過程中的理論和實驗研究，最后討論超聲波換熱技術面臨的若干挑戰并提出未來潛在的發展方向，為構建高性能和實用化超聲波換熱體系提供相應的參考。Abstract: Microscale electronic devices offer promising application capabilities in various fields, such as information, aeronautics and astronautics, energy, and chemical engineering. Specifically, the exceptional performance of high-integration and high-frequency devices leads to a significant heat flux enhancement. Conventional air and liquid cooling techniques struggle to meet the efficient heat dissipation requirement, affecting the reliability and safety of microscale electronic devices significantly. Many types of passive heat transfer process intensification strategies have been proposed recently, such as those based on adjusting element structure, surface roughness, surface hydrophobicity, and channel dimension. However, these passive strategies increase flow resistance to some extent, limiting their applicability. Ultrasound has several unique characteristics, including low cost, simple operation, flexible control, strong penetrability, and good biocompatibility. These characteristics make ultrasound a promising candidate for use in national defense, biomedical theranostics, agriculture, food, the environment, and materials. Researchers have paid considerable attention to the integration of ultrasound with heat transfer techniques, which has gradually become one of the key research directions for heat transfer enhancement. This paper aims to provide a comprehensive overview of the research progress on the intensification of the ultrasound-excited heat transfer process. First, the principles of ultrasound-excited heat transfer enhancement are introduced, and two major acoustic phenomena, acoustic cavitation and acoustic streaming, are highlighted. Theoretical and experimental studies on ultrasound-excited single-phase gas convection, single-phase liquid convection, pool boiling, and flow boiling heat transfer process intensification are then summarized, and typical studies in these fields are categorized and discussed in depth. Finally, current challenges and future directions are presented, such as simple numerical simulation models that should consider multiphysics and multidomain constraints for accurately representing the practical heat transfer process, lack of sufficient characterization methods that should develop new and integrated visualization techniques for precisely monitoring heat transfer performance, limited focus on other acoustic phenomena other than acoustic streaming and acoustic cavitation that should provide a comprehensive analysis for revealing the in-depth heat transfer mechanisms, and few attempts and pathways to industrialization that should demand researchers from different disciplines to work together and collaboratively. It is hoped that this review article will not only reveal the unprecedented functionality of ultrasound for heat transfer enhancement but will also provide critical guidelines for the rational and practical design of robust ultrasound heat transfer platforms.
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Key words:
- acoustic wave /
- heat transfer /
- ultrasound /
- convection heat transfer /
- boiling heat transfer
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圖 1 (a) 超聲波產生的空化效應和聲流效應；(b) 聲場空化強化換熱原理；(c) 聲流強化換熱示意圖[12]
Figure 1. (a) Acoustic cavitation and acoustic streaming effects excited by ultrasound; (b) principles of heat transfer enhancement by acoustic cavitation; (c) schematic diagram showing the acoustic streaming enhancement of convective heat transfer[12]
圖 2 (a) 聲波方向與氣流平行的兩平板間換熱分析[15]；(b) 聲波方向與氣流垂直的兩平板間換熱分析[17]；(c) 基于空穴的聲波強化換熱數值分析[20]
Figure 2. (a) Heat transfer between two parallel plates with wave propagation along the longitudinal direction[15]; (b) heat transfer between two parallel plates with wave propagation along the spanwise direction[17]; (c) heat transfer enhancement using acoustic waves in a cavity[20]
圖 3 (a) 錐形喇叭超聲振動強化換熱實驗裝置[24]；(b) 縱向聲振動聲流換熱實驗裝置[25]；(c) 收縮噴嘴（上）和長管噴嘴（下）類型的聲激勵沖擊射流強化換熱裝置[28]
Figure 3. (a) Experimental setup demonstrating conical horn-based ultrasonic vibrations for convective transfer enhancement[24]; (b) experimental setup for the acoustic streaming-induced heat transfer by longitudinal ultrasonic vibration[25]; (c) impinging jet heat transfer with contraction nozzle under acoustic excitation (up) and long tube nozzle (down) types[28]
圖 5 (a) 聲空化強化水平空管對流換熱[35]；(b) 喇叭狀超聲發生器強化換熱[41]；(c) 聲空化強化振蕩流熱管換熱[42]；(d) 高頻聲波強化換熱實驗裝置[45]
Figure 5. (a) Augmentation of convective heat transfer by acoustic cavitation from a horizontal circular tube[35]; (b) enhancement of ultrasonic heat transfer enhancement with a horn-type transducer[41]; (c) heat transfer enhancement of oscillating flow heat pipe by acoustic cavitation[42]; (d) experimental setup of heat transfer enhancement using high-frequency ultrasound[45]
圖 6 (a) 水平銅管聲空化沸騰換熱強化[54]；(b) 翅片管超聲波強化池沸騰換熱[64]；(c) 電聲耦合強化換熱，c1?c3為介電潤濕和聲激勵條件下汽泡的級聯行為[65]；(d) 微重力池沸騰換熱過程中空化汽泡分布(紅圈內是聲壓反節點處空化汽泡區域;紅色箭頭是汽泡向反節點的運動軌跡)[66]
Figure 6. (a) Boiling heat transfer enhancement of heated horizontal copper tube via acoustic cavitation[54]; (b) boiling heat transfer enhancement of a fin tube under ultrasound[64]; (c) integrated electric and acoustic actuation for heat transfer enhancement, c1?c3 are the sequential steps of bubble behavior by dielectrowetting and acoustic excitation[65]; (d) distribution of cavitation bubbles during the microgravity pool boiling heat transfer process (red circles indicate the regions of bubble cavitation at antinodes; red arrow indicates the trajectory of a bubble formed at the heater towards an antinode)[66]
圖 7 (a) 基于微加熱器和溫度傳感器陣列的微室流動沸騰超聲波強化換熱實驗裝置[76]；(b) 聲場垂直于流動方向的流動沸騰換熱強化微通道熱沉[77]；(c) 聲場平行于流動方向的流動沸騰換熱強化微通道熱沉[78]
Figure 7. (a) Experiment setup in a mini chamber demonstrating the enhancement of boiling heat transfer under ultrasound fields [76]; (b) enhancement of flow boiling heat transfer in a mini-channel heat sink with an acoustic field perpendicular to the flow direction[77]; (c) enhancement of flow boiling heat transfer in a mini-channel heat sink with an acoustic field parallel to the flow direction[78]
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